Synthesis of aligned carbon nanotubes by DC plasma-enhanced hot filament CVD

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24210%2F02%3A24210034" target="_blank" >RIV/46747885:24210/02:24210034 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Synthesis of aligned carbon nanotubes by DC plasma-enhanced hot filament CVD

Original language description

Aligned structures of carbon nanotubes are promising for electronic and field emission applications. The synthesis can be realized by chemical vapor deposition, namely by catalytic CVD, DC plasma enhanced hot filament CVD, and microwave plasma CVD. Aligned carbon nanotubes have been prepared from different mixtures of methane, hydrogen, argon, and nitrogen on various metal coated silicon substrates between 500 and 800°C by DC plasma enhanced hot filament CVD. In dependence on morphology of the thin metal layer, deposition and plasma parameters different carbon nanostructures have been synthesized. The sputtered metal layer thickness and the hydrogen plasma pretreatment of the metal layer have

Czech name

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Czech description

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Type

M - Conference organization

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2002

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Event location

Amsterdam

Event country

NL - THE KINGDOM OF THE NETHERLANDS

Event starting date

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Event ending date

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Total number of attendees

30

Foreign attendee count

5

Type of event by attendee nationality

EUR - Evropská akce