Modeling and fabrication of single cantilever piezoelectric microgenerator with optimized Zno active layer

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23220%2F15%3A43927032" target="_blank" >RIV/49777513:23220/15:43927032 - isvavai.cz</a>

Alternative codes found

RIV/49777513:23640/15:43927032

Result on the web

<a href="http://dx.doi.org/10.1016/j.tsf.2015.05.053" target="_blank" >http://dx.doi.org/10.1016/j.tsf.2015.05.053</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2015.05.053" target="_blank" >10.1016/j.tsf.2015.05.053</a>

Result language

angličtina

Original language name

Modeling and fabrication of single cantilever piezoelectric microgenerator with optimized Zno active layer

Original language description

This paper presents design and fabrication process details of a piezoelectric generator with a thin-film zinc oxide (ZnO) layer. Structure of the piezoelectrical cantilever beam harvester consists of ZnO layer in between two insulating Al2O3 layers an outer aluminium contacts deposited on a silicon substrate. This multilayer system was prepared by the combination of radio-frequency and direct-current magnetron sputtering. Geometrical arrangement of the substrate holder and deposition target was optimized in order to reduce the disruptive effect of the gihg energy ions bombardment on the ZnO film microstructure. We present ZnO microstructure characterization by means of X-ray diffraction and scanning electron microscopy related to the estimation of internal micro-strains, crystallite sizes and deposition rates. Maximum generated open-circuit voltage achieved close to the cantilever resonant frequency of 595 Hz was 0.975V.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2015

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Thin Solid Films

ISSN

0040-6090

e-ISSN

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Volume of the periodical

591

Issue of the periodical within the volume

30. září 2015

Country of publishing house

CH - SWITZERLAND

Number of pages

6

Pages from-to

305-310

UT code for WoS article

000362008000028

EID of the result in the Scopus database

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