Modeling and fabrication of single cantilever piezoelectric microgenerator with optimised ZnO active layer
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F15%3A00230012" target="_blank" >RIV/68407700:21230/15:00230012 - isvavai.cz</a>
Result on the web
<a href="http://www.sciencedirect.com/science/article/pii/S0040609015005878" target="_blank" >http://www.sciencedirect.com/science/article/pii/S0040609015005878</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.tsf.2015.05.053" target="_blank" >10.1016/j.tsf.2015.05.053</a>
Alternative languages
Result language
angličtina
Original language name
Modeling and fabrication of single cantilever piezoelectric microgenerator with optimised ZnO active layer
Original language description
This paper presents design and fabrication process details of a piezoelectric generator with a thin film Zinc Oxide (ZnO) layer. Structure of the piezoelectrical cantilever beam harvester consists of ZnO layer in between two insulating Al2O3 layers and outer aluminium contacts deposited on a silicon substrate. This multilayer system was prepared by the combination of radio - frequency and direct - current magnetron sputtering. Geometrical arrangement of the substrate holder and deposition target was optimized in order to reduce the disruptive effect of the high energy ions bombardment on the ZnO film microstructure. We present ZnO microstructure characterizati on by means of X-ray diffraction and scanning electron microscopy related to the estimation of internal micro-strains, crystallite sizes and deposition rates. Maximum generated open-circuit voltage achieved close to the cantilever resonant frequency of 595 Hz was 0.975 V.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20201 - Electrical and electronic engineering
Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Thin Solid Films
ISSN
0040-6090
e-ISSN
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Volume of the periodical
591
Issue of the periodical within the volume
9
Country of publishing house
CH - SWITZERLAND
Number of pages
6
Pages from-to
305-310
UT code for WoS article
000362008000028
EID of the result in the Scopus database
2-s2.0-84942838059