Microwave plasma nitriding of a low-alloy steel

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F00%3A00057347" target="_blank" >RIV/49777513:23520/00:00057347 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Microwave plasma nitriding of a low-alloy steel

Original language description

A low-alloy steel was nitrided in the downstream zone of an electron cyclotron resonance (ECR) discharge at low pressure (0.15-0.25 Pa). Structure and properties of the nitrided surfaces were primarily controlled by the temperature Ts, the nitrogen-hydrogen-argon gas mix composition, and the substrate bias voltage Ub (-1000 - +40 V) at a typical value of the incident microwave power Pi = 900 W, the distance of the substrate from output aperture of the ECR source was d = 250 mm, and the nitriding time t= 2 h.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2000

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Journal of Vacuum Science and Technology A

ISSN

07342101

e-ISSN

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Volume of the periodical

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Issue of the periodical within the volume

č. 6

Country of publishing house

US - UNITED STATES

Number of pages

7

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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