Effective nitriding of steels outside low-pressure microwave discharges

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F02%3A00069998" target="_blank" >RIV/49777513:23520/02:00069998 - isvavai.cz</a>
Alternative codes found
RIV/49777513:23520/02:00000399 RIV/49777513:23520/02:00000400
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Effective nitriding of steels outside low-pressure microwave discharges
Original language description
This paper reports on nitriding of low-alloy steel samples which are placed outside the plasma and exposed only to the effect of activated nitriding gas diffusing from a low-pressure microwave discharge with electron cyclotron resonance (ECR). It is shown that efficiency of nitriding of the samples located inside the discharge (i.e. at a standard distance d = 250 mm from the output aperture of the ECR source) and practically outside the plasma of microwave discharge (i.e. at a large distance d = 750 mm)is almost the same when 30 % of hydrogen is added into the nitrogen hydrogen gas mixture and the pressure is decreased to 0.15 Pa. This finding is of principal importance because it enables to develop a new generation of nitriding devices.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Project
<a href="/en/project/ME%20203" target="_blank" >ME 203: New plasma systems for preparation of thin films</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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