Hard and superhard nanocomposite AL-Cu-N films prepared by magnetron sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F01%3A00064887" target="_blank" >RIV/49777513:23520/01:00064887 - isvavai.cz</a>

Result on the web

—

DOI - Digital Object Identifier

—

Result language

angličtina

Original language name

Hard and superhard nanocomposite AL-Cu-N films prepared by magnetron sputtering

Original language description

The article reports on structure, mechanical properties and macrostress of Al-Cu-N films deposited by reactive sputtering using a dc unbalanced magnetron equipped with a round planar aluminium target fixed to the magnetron cathode with a copper ring. A systematic investigation of sputtered films showed that: (i) Al-Cu-N is a new nanocomposite material which can form superhard (>40 GPa) coatings with a maximum microhardness of approximately 48 GPa; (ii) Al-Cu-N can easily form a very fine-grained material; (iii) the size of grains decides on the macrostress in Al-Cu-N films; the Al-Cu-N films composed of grains with the average size of 9.5 nm exhibit a low (<0.5 GPa) macrostress and, on the contrary, the Al-Cu-N films composed of larger (>10 nm) grainsexhibit large macrostress of several GPa; and (iv) the macrostress in Al-Cu-N films can be varied from tension to compression by the variation of the energy delivered to the growing film.

Czech name

—

Czech description

—

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

—

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2001

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Coatings Technology

ISSN

02578972

e-ISSN

—

Volume of the periodical

Vol. 142

Issue of the periodical within the volume

leden

Country of publishing house

US - UNITED STATES

Number of pages

7

Pages from-to

—

UT code for WoS article

—

EID of the result in the Scopus database

—