Magnetron sputtered Cr-Ni-N and Ti-Mo-N films: comparison of mechanical properties
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F01%3A00064889" target="_blank" >RIV/49777513:23520/01:00064889 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Magnetron sputtered Cr-Ni-N and Ti-Mo-N films: comparison of mechanical properties
Original language description
This article reports on structure and mechanical properties of Cr-Ni-N and Ti-Mo-N films with a low (<10 at.%) content of Ni or Mo, respectively. The films were deposited by reactive sputtering using d.c. unbalanced magnetron equipped with a round planarCr target fixed to the magnetron cathode with a Ni ring or alloyed TiMo (90:10 at.%) target. The investigation of sputtered films showed that: (i) both Cr-Ni-N and Ti-Mo-N films can form a superhard material with a maximum microhardness Hmax of approximately 45 GPa; (ii) the films with Hmax exhibit a single-oriented structure and; (iii) the Cr-Ni-N films exhibit a higher resistance to plastic deformation compared to the Ti-Mo-N films. The relationships between microhardness, reduced Young's modulus andelastic recovery evaluated from loading/unloading curves measured a computer-controlled microhardness tester Fischerscope H100 are given.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2001
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
02578972
e-ISSN
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Volume of the periodical
Vol. 142
Issue of the periodical within the volume
leden
Country of publishing house
US - UNITED STATES
Number of pages
6
Pages from-to
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UT code for WoS article
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EID of the result in the Scopus database
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