Morphology and microstructure of hard and superhard Zr-Cu-N nanocomposite coatings
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F02%3A00073546" target="_blank" >RIV/49777513:23520/02:00073546 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Morphology and microstructure of hard and superhard Zr-Cu-N nanocomposite coatings
Original language description
In the present article, we compare the morphology and microstructure of hard (<40 GPa) and superhard (>40 GPa) Zr-Cu-N nanocomposite films. It is shown that the morphology strongly depends on the Cu content in the film. The film with a low (1-2 at.%) Cucontent exhibits a columnar structure. In contrast, films with a higher (>5-6 at.%) Cu content have a globular structure. The hardness of films depends on both the Cu content in the film and the structure of individual phases of the nanocomposite. The nanocomposite film of type nc-/nc- exhibits higher hardness than that of type nc-/a-; here "nc-" and "a-" denote the nanocrystalline and amorphous phases, respectively. The film of type nc-ZrN/nc-Cu with a low (1-2 at.%) content exhibits the highest hardness of 50 GPa.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/ME%20173" target="_blank" >ME 173: Magnetron sputtering of thin films</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Japan Journal of Applied Physics
ISSN
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e-ISSN
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Volume of the periodical
Vol. 41
Issue of the periodical within the volume
part 1, no
Country of publishing house
JP - JAPAN
Number of pages
5
Pages from-to
6529
UT code for WoS article
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EID of the result in the Scopus database
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