Thermal stability of alumina thin films containing ?-Al2O3 phase prepared by reactive magnetron sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F10%3A00503497" target="_blank" >RIV/49777513:23520/10:00503497 - isvavai.cz</a>
Alternative codes found
RIV/68378271:_____/10:00438332
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Thermal stability of alumina thin films containing ?-Al2O3 phase prepared by reactive magnetron sputtering
Original language description
The paper reports on thermal stability of alumina thin films containing ?-Al2O3 phase and its conversion to a thermodynamically stable ?-Al2O3 phase during a post-deposition equilibrium thermal annealing. The films were prepared by reactive magnetron sputtering and subsequently post-deposition annealing was carried out in air at temperatures ranging from 700 °C to 1150 °C and annealing times up to 5 h using a thermogravimetric system. The evolution of the structure was investigated by means of X-ray diffraction after cooling down of the films. It was found that (1) the nanocrystalline ?-Al2O3 phase in the films is thermally stable up to 1000 °C even after 5 h of annealing, (2) the nanocrystalline ?-Al2O3 phase was observed in a narrow time and temperature region at >=1050 °C, and (3) annealing at 1100 °C for 2 h resulted in a dominance of the ?-Al2O3 phase only in the films with a sufficient thickness.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Applied Surface Science
ISSN
0169-4332
e-ISSN
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Volume of the periodical
257
Issue of the periodical within the volume
5
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
5
Pages from-to
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UT code for WoS article
000281941900068
EID of the result in the Scopus database
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