Thermal stability of structure, microstructure and enhanced properties of Zr–Ta–O films with a low and high Ta content
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F18%3A43949543" target="_blank" >RIV/49777513:23520/18:43949543 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1016/j.surfcoat.2017.12.026" target="_blank" >https://doi.org/10.1016/j.surfcoat.2017.12.026</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2017.12.026" target="_blank" >10.1016/j.surfcoat.2017.12.026</a>
Alternative languages
Result language
angličtina
Original language name
Thermal stability of structure, microstructure and enhanced properties of Zr–Ta–O films with a low and high Ta content
Original language description
The paper reports on the thermal stability of two ternary Zr–Ta–O films (Zr25Ta5O70, Ta25Zr5O70) and two binary oxide films (ZrO2, Ta2O5) prepared by reactive high-power impulse magnetron sputtering using a pulsed reactive gas flow control. The thermal stability of the structure, microstructure, mechanical and optical properties of the films was investigated in air in the temperature range of 650 °C – 1300 °C. It was found that both ternary Zr–Ta–O films investigated exhibit an enhanced thermal stability of the as-deposited structure and enhanced properties compared to the corresponding binary oxides. The Zr25Ta5O70 film is a single-phase material with a nanocrystalline structure corresponding to the TaZr2.75O8 compound. This phase is stable up to the maximum temperature investigated (1300 °C) and the film retains a high hardness (19 GPa) and refractive index (2.25) even after the annealing to 1000 °C in air. The Ta25Zr5O70 film exhibits an amorphous structure in the as-deposited state with its thermal stability up to 800 °C, which is about 100 °C more than for the Ta2O5 film.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
<a href="/en/project/GA16-18183S" target="_blank" >GA16-18183S: Advanced surface coatings with enhanced properties and thermal stability</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
335
Issue of the periodical within the volume
15 February 2018
Country of publishing house
CH - SWITZERLAND
Number of pages
9
Pages from-to
95-103
UT code for WoS article
000424720800011
EID of the result in the Scopus database
2-s2.0-85038809274