Measurement of thermal properties of thin films up to high temperatures - pulsed photothermal radiometry system and Si-B-C-N films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F10%3A00503774" target="_blank" >RIV/49777513:23520/10:00503774 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Measurement of thermal properties of thin films up to high temperatures - pulsed photothermal radiometry system and Si-B-C-N films

Original language description

A new arrangement of two-detector pulsed photothermal radiometry measurement system has been developed enabling temperature dependence measurement of thermal properties of thin films up to high temperatures. The system enables simultaneous determinationof the thin film effusivity, thermal conductivity, and volumetric specific heat in the temperature range from room temperature to 600 °C. The samples are placed in a vacuum chamber. The temperatures in the system were verified by an independent measurement and the system was tested on known bulk samples. Advantages and shortcomings of the method are described and discussed. Furthermore, Si-B-C-N thin films were studied. These amorphous ceramic materials possess an interesting set of mechanical and thermal properties. In the studied temperature range, from 20 to 600 °C, both the thermal conductivity and volumetric specific heat increased with increasing temperature.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BJ - Thermodynamics

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2010

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Review of Scientific Instruments

ISSN

0034-6748

e-ISSN

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Volume of the periodical

81

Issue of the periodical within the volume

12

Country of publishing house

US - UNITED STATES

Number of pages

7

Pages from-to

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UT code for WoS article

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EID of the result in the Scopus database

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