The effect of addition of Al in zirkonium dioxide thin film on its resistance to cracking

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F12%3A43915535" target="_blank" >RIV/49777513:23520/12:43915535 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.surfcoat.2012.07.017" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2012.07.017</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2012.07.017" target="_blank" >10.1016/j.surfcoat.2012.07.017</a>

Result language
angličtina
Original language name
The effect of addition of Al in zirkonium dioxide thin film on its resistance to cracking
Original language description
The paper reports on the structure, mechanical and optical properties of sputtered Zr-Al-O films. The Zr-Al-O films with different Zr/Al ratio were prepared by a reactive sputtering using ac pulse dual magnetrons. The magnetrons were equipped with a target composed of Al plate fixed to the magnetron cathode by a Zr fixing ring. The content of Al in the Zr-Al-O film was controlled by inner diameter of Zr ring. It makes possible to control effectively the structure of the Zr-Al-O film determined by a mixture of the crystalline zirconium dioxide phase and the amorphous alumina phase. The effect of Al content on the structure, mechanical and optical properties of the Zr-Al-O film is investigated in detail. It was found that (i) the Zr-Al-O films with valueof Zr/Al less than one are X-ray amorphous and exhibit low hardness, an effective Young's modulus resulting in a low hardness to effective Young's modulus ratio and low elastic recovery and (ii) the Zr-Al-O films with value of Zr/Al high
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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