Pulsed reactive magnetron sputtering of high-temperature Si-B-C-N films with high optical transparency

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F13%3A43918474" target="_blank" >RIV/49777513:23520/13:43918474 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1016/j.surfcoat.2013.03.033" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2013.03.033</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2013.03.033" target="_blank" >10.1016/j.surfcoat.2013.03.033</a>

Result language

angličtina

Original language name

Pulsed reactive magnetron sputtering of high-temperature Si-B-C-N films with high optical transparency

Original language description

Multifunctional Si-B-C-N films with exceptionally high thermal stability are becoming increasingly attractive because of their potential applications in coating technologies, and in high-temperature electronics and optoelectronics. In the present work, amorphous Si-B-C-N films were deposited onto SiC and Cu floating substrates using pulsed dc magnetron co-sputtering of a single boron carbide (25%)-silicon (75 %) target in an argon-nitrogen gas mixture. High-quality defect-free films with smooth surfaces(average roughness of 4 nm) were produced. The films exhibited a hardness of 22 GPa, an effective Young's modulus of 170 GPa and an elastic recovery of 75%. The oxidation resistance of the Si-B-C-N films in air was found to be very high up to 1600 °C. Annealing of the as-deposited films in He to 1400 °C led to a slight decrease in the refractive index from 1.92 to 1.91 and to an increase in the extinction coefficient from 0.0003 to 0.003 (both at the wavelength of 550 nm).

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

<a href="/en/project/GAP108%2F12%2F0393" target="_blank" >GAP108/12/0393: Hard nanocomposite coatings with enhanced toughness and unique properties</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface & Coatings Technology

ISSN

0257-8972

e-ISSN

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Volume of the periodical

226

Issue of the periodical within the volume

1

Country of publishing house

US - UNITED STATES

Number of pages

6

Pages from-to

34-39

UT code for WoS article

000320415400006

EID of the result in the Scopus database

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