Flexible hard Al-Si-N films for high temperature operation
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F16%3A43930531" target="_blank" >RIV/49777513:23520/16:43930531 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1016/j.surfcoat.2016.05.054" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2016.05.054</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2016.05.054" target="_blank" >10.1016/j.surfcoat.2016.05.054</a>
Alternative languages
Result language
angličtina
Original language name
Flexible hard Al-Si-N films for high temperature operation
Original language description
This article reports on flexible hard Al-Si-N films prepared by reactive magnetron sputtering. The structure and mechanical properties of Al-Si-N films were controlled by the content of Si in the film, partial pressure of nitrogen pN2 used in sputtering and the power delivered to the magnetron. The Al-Si-N films with a low (LESS-THAN OR EQUAL TO 10 at.%) Si content and with a high (GREATER-THAN OR EQUAL TO 20 at.%) Si content were prepared. Correlations between the structure, microstructure, mechanical properties and their thermal stability of the Al-Si-N films are analyzed in detail. Thermal stability of Al-Si-N films was assessed by thermal annealing in air and water vapor up to annealing temperature Ta = 1200 oC. It is shown that (1) the increase of Si content in the Al-Si-N film leads to the change of its crystalline structure from polycrystalline to X-ray amorphous and (2) the flexible hard Al-Si-N films with high (i) hardness H ALMOST EQUAL TO 20 GPa, (ii) ratio H/E* GREATER-THAN OR EQUAL TO 0.1, and (iii) elastic recovery We GREATER-THAN OR EQUAL TO 60% exhibit enhanced resistance to cracking and (3) the thermal stability of Al-Si-N films with a high (GREATER-THAN OR EQUAL TO 20 at.%) Si content achieves up to Ta ALMOST EQUAL TO 1200 oC in air and up to Ta ALMOST EQUAL TO 800 oC in water vapor. Conditions under which the flexible hard Al-Si-N films with enhanced resistance to cracking and high thermal stability can be prepared are described in detail.
Czech name
—
Czech description
—
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JJ - Other materials
OECD FORD branch
—
Result continuities
Project
<a href="/en/project/GAP108%2F12%2F0393" target="_blank" >GAP108/12/0393: Hard nanocomposite coatings with enhanced toughness and unique properties</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
—
Volume of the periodical
307
Issue of the periodical within the volume
15 December 2016
Country of publishing house
CH - SWITZERLAND
Number of pages
7
Pages from-to
1112-1118
UT code for WoS article
000390721800018
EID of the result in the Scopus database
2-s2.0-84971657616