(Zr,Ti,O) alloy films with enhanced hardness and resistance to cracking prepared by magnetron sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F17%3A43931824" target="_blank" >RIV/49777513:23520/17:43931824 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1016/j.surfcoat.2017.05.006" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2017.05.006</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2017.05.006" target="_blank" >10.1016/j.surfcoat.2017.05.006</a>

Result language

angličtina

Original language name

(Zr,Ti,O) alloy films with enhanced hardness and resistance to cracking prepared by magnetron sputtering

Original language description

The article reports on the effect of (i) the ion bombardment and (ii) the addition of small amount of oxygen into Ar sputtering gas on the structure, microstructure, mechanical properties and macrostress of the (Zr,Ti) alloy films prepared by DC magnetron sputtering. Properties of the (Zr,Ti) alloy films with three different elemental compositions – (1) Zr95Ti5, (2) Zr30Ti70 and (3) Zr5Ti95 were investigated in detail. It was found that (1) the (Zr,Ti) alloy films sputtered at a low value of the negative substrate bias Us = − 50 V are well crystalline, (2) the (Zr,Ti) alloy films sputtered at high values of the negative substrate bias | Us | ≥ 150 V are nanocrystalline, (3) the (Zr,Ti) alloy films, sputtered at all substrate biases Us used in our experiments and ranging from − 50 to − 250 V, exhibit low hardness H &lt; 10 GPa, low ratio H/E* &lt; 0.1, low elastic recovery We &lt; 60% and low resistance to cracking and (4) the addition of small amount of oxygen in Ar sputtering gas makes it possible to sputter nanocrystalline (Zr,Ti,O) alloy films with high hardness H &gt; 10 GPa, high ratio H/E* ≥ 0.1, high elastic recovery We ≥ 60% and enhanced resistance to cracking; here E* is the effective Young&apos;s modulus. The main result of the presented investigation is the demonstration that the incorporation of a small amount of O in a (Zr,Ti) alloy film is a very effective way to increase its hardness and to form the flexible (Zr,Ti,O) alloy films with enhanced resistance to cracking.

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

20506 - Coating and films

Project

<a href="/en/project/GA16-18183S" target="_blank" >GA16-18183S: Advanced surface coatings with enhanced properties and thermal stability</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2017

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

—

Volume of the periodical

322

Issue of the periodical within the volume

AUG 15 2017

Country of publishing house

CH - SWITZERLAND

Number of pages

6

Pages from-to

86-91

UT code for WoS article

000403995700012

EID of the result in the Scopus database

2-s2.0-85019389088