Flexible hard (Zr, Si) alloy films prepared by magnetron sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F19%3A43955811" target="_blank" >RIV/49777513:23520/19:43955811 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1016/j.tsf.2019.03.028" target="_blank" >https://doi.org/10.1016/j.tsf.2019.03.028</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.tsf.2019.03.028" target="_blank" >10.1016/j.tsf.2019.03.028</a>
Alternative languages
Result language
angličtina
Original language name
Flexible hard (Zr, Si) alloy films prepared by magnetron sputtering
Original language description
The article reports on the investigation of mechanical properties of Si-rich (Zr, Si) alloy films deposited by magnetron sputtering. The main aim of this investigation is to develop flexible hard (Zr, Si) alloy films with enhanced resistance to cracking. The (Zr, Si) films were formed by a pulsed dual magnetron discharge. Mechanical properties and elemental composition of sputtered (Zr, Si) films were tuned by a negative substrate bias, i.e. by the energy delivered to the growing film by bombarding ions. It was found that using of pulsed dual magnetron discharge makes it possible to deposit flexible hard (Zr, Si) alloy films with high values of hardness H ≈ 20 GPa, ratio H/E* > 0.1, elastic recovery We > 60%, compressive macrostress and dense, voids-free microstructure. These alloy films contain the same amount of Zr and Si in at.% and exhibit strongly enhanced resistance to cracking.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
<a href="/en/project/LO1506" target="_blank" >LO1506: Sustainability support of the centre NTIS - New Technologies for the Information Society</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Thin Solid Films
ISSN
0040-6090
e-ISSN
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Volume of the periodical
688
Issue of the periodical within the volume
31 OCT 2019
Country of publishing house
CH - SWITZERLAND
Number of pages
7
Pages from-to
„137216-1“-„137216-7“
UT code for WoS article
000485256500020
EID of the result in the Scopus database
2-s2.0-85063863136