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Flexible hard (Zr, Si) alloy films prepared by magnetron sputtering

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F19%3A43955811" target="_blank" >RIV/49777513:23520/19:43955811 - isvavai.cz</a>

  • Result on the web

    <a href="https://doi.org/10.1016/j.tsf.2019.03.028" target="_blank" >https://doi.org/10.1016/j.tsf.2019.03.028</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.tsf.2019.03.028" target="_blank" >10.1016/j.tsf.2019.03.028</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Flexible hard (Zr, Si) alloy films prepared by magnetron sputtering

  • Original language description

    The article reports on the investigation of mechanical properties of Si-rich (Zr, Si) alloy films deposited by magnetron sputtering. The main aim of this investigation is to develop flexible hard (Zr, Si) alloy films with enhanced resistance to cracking. The (Zr, Si) films were formed by a pulsed dual magnetron discharge. Mechanical properties and elemental composition of sputtered (Zr, Si) films were tuned by a negative substrate bias, i.e. by the energy delivered to the growing film by bombarding ions. It was found that using of pulsed dual magnetron discharge makes it possible to deposit flexible hard (Zr, Si) alloy films with high values of hardness H ≈ 20 GPa, ratio H/E* &gt; 0.1, elastic recovery We &gt; 60%, compressive macrostress and dense, voids-free microstructure. These alloy films contain the same amount of Zr and Si in at.% and exhibit strongly enhanced resistance to cracking.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    20506 - Coating and films

Result continuities

  • Project

    <a href="/en/project/LO1506" target="_blank" >LO1506: Sustainability support of the centre NTIS - New Technologies for the Information Society</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2019

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Thin Solid Films

  • ISSN

    0040-6090

  • e-ISSN

  • Volume of the periodical

    688

  • Issue of the periodical within the volume

    31 OCT 2019

  • Country of publishing house

    CH - SWITZERLAND

  • Number of pages

    7

  • Pages from-to

    „137216-1“-„137216-7“

  • UT code for WoS article

    000485256500020

  • EID of the result in the Scopus database

    2-s2.0-85063863136