Identification of electrical properties in individual thickness layers in aluminium-doped zinc oxide films sputtered at 100 degrees C

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F18%3A43952397" target="_blank" >RIV/49777513:23520/18:43952397 - isvavai.cz</a>

Alternative codes found

RIV/49777513:23640/18:43952397

Result on the web

<a href="http://dx.doi.org/10.1016/j.tsf.2018.06.036" target="_blank" >http://dx.doi.org/10.1016/j.tsf.2018.06.036</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2018.06.036" target="_blank" >10.1016/j.tsf.2018.06.036</a>

Result language

angličtina

Original language name

Identification of electrical properties in individual thickness layers in aluminium-doped zinc oxide films sputtered at 100 degrees C

Original language description

This work presents a detailed study of aluminium-doped zinc oxide thin films sputtered at 100 °C, with a focus on the correlation between structural and electrical properties. The structural properties are identified by SEM microscopy and X-ray diffraction, while the electrical properties are described by means of the carrier concentration and the carrier mobility, both determined experimentally. The study consists of a set of thin films with thicknesses from ~16 to ~1120 nm. Our analysis shows that the electrical properties in each individual thickness layer gradually change with its distance from the substrate, which correlates very well to the changes observed in structural properties. Along with our experimental findings, we have designed a one-dimensional mathematical model based on the trapping states related to the grain boundaries. This model offers a deeper insight into the relation between the film structure and the film resistivity and allows identification of additional material characteristics such us the trap density at the grain boundary.

Czech name

—

Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

<a href="/en/project/EF15_003%2F0000358" target="_blank" >EF15_003/0000358: Computational and Experimental Design of Advanced Materials with New Functionalities</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2018

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Thin Solid Films

ISSN

0040-6090

e-ISSN

—

Volume of the periodical

660

Issue of the periodical within the volume

AUG 30 2018

Country of publishing house

CH - SWITZERLAND

Number of pages

6

Pages from-to

471-476

UT code for WoS article

000441177500063

EID of the result in the Scopus database

2-s2.0-85049305656