Optical properties of the plasma hydrogenated ZnO thin films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F17%3A00481245" target="_blank" >RIV/68378271:_____/17:00481245 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1515/jee-2017-0060" target="_blank" >http://dx.doi.org/10.1515/jee-2017-0060</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1515/jee-2017-0060" target="_blank" >10.1515/jee-2017-0060</a>
Alternative languages
Result language
angličtina
Original language name
Optical properties of the plasma hydrogenated ZnO thin films
Original language description
We have optimized the deposition of the highly electrically resistive undoped polycrystalline ZnO thin layers on fused silica substrates by the DC reactive magnetron sputtering of metallic zinc target in argonne/oxide atmosphere and we introduced the postdeposition hydrogen plasma doping. The thickness of thin film was evaluated by reflectance interferometry using the metallographic optical microscope fiber coupled to the CCD spectrometer operating in 400 to 1000 nm spectral range. The optical absorption was measured by photothermal deflection spectroscopy operating in 300 - 1600 nm spectral range. The change of the optical absorption edge and the increase of the infrared optical absorption was detected in hydrogenated ZnO. The increase of the infrared optical absorption goes with the increase of the electrical conductivity. We conclude that the plasma hydrogenation of the intrinsic ZnO thin films is related to increase of the free carrier concentration.n
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
<a href="/en/project/GC16-10429J" target="_blank" >GC16-10429J: Optical, electrical and magnetical properties of ZnO nanostructures</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Electrical Engineering - Elektrotechnický časopis
ISSN
1335-3632
e-ISSN
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Volume of the periodical
68
Issue of the periodical within the volume
7
Country of publishing house
SK - SLOVAKIA
Number of pages
4
Pages from-to
70-73
UT code for WoS article
000423262300014
EID of the result in the Scopus database
2-s2.0-85040807874