Microstructure related optical characterization of technologically relevant hydrogenated silicon thin films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F08%3A43898285" target="_blank" >RIV/49777513:23640/08:43898285 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.822348" target="_blank" >http://dx.doi.org/10.1117/12.822348</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.822348" target="_blank" >10.1117/12.822348</a>
Alternative languages
Result language
angličtina
Original language name
Microstructure related optical characterization of technologically relevant hydrogenated silicon thin films
Original language description
We report results obtained from measurements of UV Vis, FTIR and Raman spectra carried out on a series of silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen. Spectral refractive indices, extinction coefficients, optical band gap energies, hydrogen content, the microstructure factor, and grain size were determined as a function of the hydrogen dilution. Hydrogen dilution of silane results in an inhomogeneous growth during which the materialevolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (c-Si:H). With increasing dilution Si:H films become mixed-phase materials with changing volume fractions of crystalline and amorphous phases and voids. The optical band gap energies were determined from transmittance spectra. The grain size was determined from Raman spectra and the contribution of small and large grains was detected.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
<a href="/en/project/1M06031" target="_blank" >1M06031: Materials and components for environment protection</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2008
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings SPIE
ISBN
978-80-8070-709-5
ISSN
0277-786X
e-ISSN
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Number of pages
8
Pages from-to
1-8
Publisher name
SPIE
Place of publication
S.l.
Event location
Polanica Zdrój
Event date
Sep 8, 2008
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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