Crystallization process of amorphous silicon films on glass monitored by in-situ XRD
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F09%3A00502543" target="_blank" >RIV/49777513:23640/09:00502543 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Crystallization process of amorphous silicon films on glass monitored by in-situ XRD
Original language description
The crystallization process of amorphous silicon (a-Si) and hydrogenated a-Si (a-Si:H) films by solid phase crystallization (SPC) was monitored by in-situ X-ray diffraction (XRD). The expanding thermal plasma CVD (ETP CVD) and electron beam (EB) evaporation were used for the deposition of a-Si:H and a-Si films, respectively. The properties of the a-Si(:H) films were determined prior to crystallization by Fourier transform infrared spectroscopy, Raman spectroscopy and XRD. The crystallization process wasinvestigated by using a high temperature chamber adapted for ?in situ? monitoring by XRD. These experiments were carried out at temperatures in the range of 580 to 620 °C and provided us with information about the transition of the amorphous to the polycrystalline state. The transition behavior differed for films with and without the presence of hydrogen. The presence of hydrogen affected the annealing time required for full crystallization. The phase transformation is slightly influenc
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
<a href="/en/project/1M06031" target="_blank" >1M06031: Materials and components for environment protection</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
24th European Photovoltaic Solar Energy Conference and Exhibition
ISBN
3-936338-25-6
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
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Publisher name
WIP - Renewable Energies
Place of publication
Munich
Event location
Hamburg, Germany
Event date
Sep 25, 2009
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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