A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F10%3A00503192" target="_blank" >RIV/49777513:23640/10:00503192 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness
Original language description
We report results obtained from optical absorption studies carried out on amorphous silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane plasma. The influence of the film thickness was studied on the two series of samples deposited from undiluted silane and under moderate hydrogen dilution of silane. Spectral refractive indices and absorption coefficients were determined from transmittance spectra. The spectral absorption coefficients were used to determine theTauc optical band-gap energies Eg, the B factors of the Tauc plots, the iso-energy values E 04 (energy at which the absorption coefficient is equal to 10 4 cm-1). The results were correlated with volume fractions of the amorphous phase and voids and withthe film thickness.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
<a href="/en/project/1M06031" target="_blank" >1M06031: Materials and components for environment protection</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Applied Surface Science
ISSN
0169-4332
e-ISSN
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Volume of the periodical
256
Issue of the periodical within the volume
18
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
5
Pages from-to
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UT code for WoS article
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EID of the result in the Scopus database
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