Change of optical properties of a-Si:H films in dependence on different material structure
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F12%3A43917412" target="_blank" >RIV/49777513:23640/12:43917412 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Change of optical properties of a-Si:H films in dependence on different material structure
Original language description
Optical properties of hydrogenated amorphous (a-Si:H) and microcrystalline silicon (mýc-Si:H) are related to changes in the structural and compositional disorder. This paper describes two different technologies of fabrication of mýc-Si:H films. One of the possibilities how to obtain mýc-Si:H films of a good quality is plasma enhanced chemical vapour deposition (PECVD) with controlled hydrogen diluting of silane precursor. Second option is based on two steps: (i) PECVD deposition of a-Si:H films and (ii)isothermal heat treatment at temperature around 600 °C with phase transformation from amorphous to microcrystalline phase.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
BK - Liquid mechanics
OECD FORD branch
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Result continuities
Project
<a href="/en/project/ED2.1.00%2F03.0088" target="_blank" >ED2.1.00/03.0088: Centre of the New Technologies and Materials</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů