Self-texture control of Zno films prepared by reactive RF magnetron sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F14%3A43923268" target="_blank" >RIV/49777513:23640/14:43923268 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.4028/www.scientific.net/KEM.605.219" target="_blank" >http://dx.doi.org/10.4028/www.scientific.net/KEM.605.219</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.4028/www.scientific.net/KEM.605.219" target="_blank" >10.4028/www.scientific.net/KEM.605.219</a>
Alternative languages
Result language
angličtina
Original language name
Self-texture control of Zno films prepared by reactive RF magnetron sputtering
Original language description
Zinc Oxide (ZnO) is a wide bandgap semiconductor material which can be successfully used for wide variety of potential applications such as biosensors or acoustic resonator devices. ZnO normally crystallizes in the wurtzite structure with c-axis (001) preferred orientation. However, for bio-sensing in liquids, it is necessary to generate a shear horizontal mode wave, where the wave displacement is within the plane of the crystal surface. For generation of such a shear horizontal wave, a-axis film textures such as the (110) or (100) is necessary. This work is focused on the preferred orientation control of ZnO film prepared by RF magnetron sputtering. It is found that preferred orientation can be controlled by substrate bias and substrate temperature during deposition without the use of expensive crystalline substrates. There are three areas of operating parameters when the structure of the ZnO films is dominated by different preferred orientation. Moreover, the film annealing was perfo
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JJ - Other materials
OECD FORD branch
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Result continuities
Project
<a href="/en/project/ED2.1.00%2F03.0088" target="_blank" >ED2.1.00/03.0088: Centre of the New Technologies and Materials</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Key Engineering Materials
ISBN
978-3-03835-051-4
ISSN
1013-9826
e-ISSN
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Number of pages
4
Pages from-to
219-222
Publisher name
Trans Tech Publications LTD
Place of publication
Stafa-Zurich
Event location
Praha
Event date
Sep 13, 2013
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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