Investigation of Preferred Orientation of ZnO Thin Films Prepared by Magnetron Sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F14%3A43924054" target="_blank" >RIV/49777513:23640/14:43924054 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1166/sl.2014.3399" target="_blank" >http://dx.doi.org/10.1166/sl.2014.3399</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1166/sl.2014.3399" target="_blank" >10.1166/sl.2014.3399</a>

Result language

angličtina

Original language name

Investigation of Preferred Orientation of ZnO Thin Films Prepared by Magnetron Sputtering

Original language description

Zinc Oxide (ZnO) is a wide bandgap semiconductor material which can be successfully used for wide variety of applications such as biosensors and acoustic resonator devices. ZnO normally crystallizes in the wurtzite structure with c-axis (002) preferred orientation. However, for bio-sensing in liquids, it is necessary to generate a shear horizontal mode wave, where the wave displacement is within the plane of the crystal surface. For generation of a shear horizontal wave, a-axis film textures such as the(110) or (100) are necessary. This work is focused on the preferred orientation control of ZnO film prepared by radio frequency magnetron sputtering. It was found that preferred orientation can be controlled by energy delivered to unit volume of the film at suitable substrate temperature. We have identified three different deposition regimes leading to distinctive preferred orientation.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/ED2.1.00%2F03.0088" target="_blank" >ED2.1.00/03.0088: Centre of the New Technologies and Materials</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2014

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Sensor Letters

ISSN

1546-198X

e-ISSN

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Volume of the periodical

12

Issue of the periodical within the volume

12

Country of publishing house

CA - CANADA

Number of pages

5

Pages from-to

1760-1764

UT code for WoS article

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EID of the result in the Scopus database

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