Effective Passivation of Black Silicon Surfaces via Plasma-Enhanced Chemical Vapor Deposition Grown Conformal Hydrogenated Amorphous Silicon Layer

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F20%3A43956871" target="_blank" >RIV/49777513:23640/20:43956871 - isvavai.cz</a>
Result on the web
<a href="http://hdl.handle.net/11025/36633" target="_blank" >http://hdl.handle.net/11025/36633</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/pssr.201900087" target="_blank" >10.1002/pssr.201900087</a>

Result language
angličtina
Original language name
Effective Passivation of Black Silicon Surfaces via Plasma-Enhanced Chemical Vapor Deposition Grown Conformal Hydrogenated Amorphous Silicon Layer
Original language description
Solar cells based on black silicon (b-Si) are proven to be promising in photovoltaics (PVs) by exceeding 22%efficiency. To reach high efficiencies with b-Si surfaces, the most crucial step is the effective surface passivation. Up to now, the highest effective minority carrier lifetimes are achieved with atomic layer-deposited Al2O3 or thermal SiO2. Plasmaenhanced chemical vapor deposition (PECVD)-grown hydrogenated amorphous silicon (a-Si:H) passivation of b-Si is seldom reported due to conformality problems. In this current study, b-Si surfaces superposed on standard pyramidal textures, also known as modulated surface textures (MSTs), are successfully passivated by PECVD-grown conformal layers of a-Si:H. It is shown that under proper plasma-processing conditions, the effective minority carrier lifetimes of samples endowed with front MST and rear standard pyramidal textures can reach up to 2.3 ms. A route to the conformal growth is described and developed by transmission electron microscopic (TEM) images. Passivated MST samples exhibit less than 4% reflection in a wide spectral range from 430 to 1020 nm.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10301 - Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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