Application of the Warm Probe and fast Measurements for Probe Diagnostics of the low Temperature Plasma
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A12410%2F01%3A00002989" target="_blank" >RIV/60076658:12410/01:00002989 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Application of the Warm Probe and fast Measurements for Probe Diagnostics of the low Temperature Plasma
Original language description
The paper deals with application of warm probes of the high - speed measuring system for the "in-situ" Langmuir Probe diagnostics of the plasma. The system is dedicated for special applications in the plasma - chemical deposition processes.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2001
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Fyzika na přelomu tisíciletí
ISBN
80-7040-519-8
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
120-125
Publisher name
Jihočeská univerzita v Českých Budějovicích
Place of publication
České Budějovice
Event location
České Budějovice
Event date
Sep 18, 2001
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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