Study of the parameters of barrier torch discharge

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A_____%2F02%3A00004165" target="_blank" >RIV/60076658:_____/02:00004165 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Study of the parameters of barrier torch discharge

Original language description

The deposition of thin films is progressively developing in the last time. One of many possibilities is based on employing active plasma in the plasma - chemical reactor. Two types of discharges are often used for these applications: the RF hollow cathode discharge at low pressure and RF torch discharge burning at atmospheric air - pressure. The technical applications demand knowledge of physical parameters controlling the characteristics of deposited thin films. We have studied RF barrier torch discharge burning at atmospheric air - pressure. Our work concentrates on the diagnostics of the temperature of neutral particles in the working gas - in our case Argon. For study of the transparent objects we have used a configuration of holographic interferometer. The phase shift is computed from the interference pattern by the slightly modified Takeda's method. Providing cylindrical symmetry we apply the inverse Abel transformation to the phase shift to determine the temperature distribution

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2002

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Czech. J. Phys.

ISSN

0011-4626

e-ISSN

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Volume of the periodical

x

Issue of the periodical within the volume

52

Country of publishing house

CZ - CZECH REPUBLIC

Number of pages

6

Pages from-to

509-514

UT code for WoS article

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EID of the result in the Scopus database

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