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Raman spectra of erbium doped gallium nitride layers fabricated by magnetron sputtering

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22310%2F04%3A00011663" target="_blank" >RIV/60461373:22310/04:00011663 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Raman spectra of erbium doped gallium nitride layers fabricated by magnetron sputtering

  • Original language description

    We report about fabrication of GaN layers by magnetron sputtering on silicon substrates using gallium targets and argon-nitrogen mixtures. Erbium doping into the GaN occurred from metallic erbium powder that was deposited onto the top of the gallium targets. Fabricated samples were characterized by X-ray-diffraction, Raman spectra and using nuclear analytical methods as RBS and ERDA. The properties of the samples were compared with that fabricated by MOCVD method.

  • Czech name

    Ramanova spektra vrstev nitridu gallitého obsahujících erbium připravených magnetronovým naprašováním

  • Czech description

    Ramanova spektra vrstev nitridu gallitého obsahujících erbium připravených magnetronovým naprašováním

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    CA - Inorganic chemistry

  • OECD FORD branch

Result continuities

  • Project

  • Continuities

    Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2004

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Proceedings of the 3rd European Microelectronics and Packaging Symposium

  • ISBN

    80-2835-x

  • ISSN

  • e-ISSN

  • Number of pages

    6

  • Pages from-to

    577-582

  • Publisher name

    IMAPS CZ&SK

  • Place of publication

    Praha

  • Event location

    Praha

  • Event date

    Jun 16, 2004

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article