3D characterization of material structure using scanning electron microscopy and focused ion beam

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22310%2F10%3A00023126" target="_blank" >RIV/60461373:22310/10:00023126 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
3D characterization of material structure using scanning electron microscopy and focused ion beam
Original language description
The importance of knowledge of the microstructure and its subsequent influence on properties is a basic tenet of material science. However, many commonly used characterization methods (e.g. scanning electron microscopy ? SEM) provide only information intwo dimensions (2D) and do not allow to obtain depth profile of material. The possibilities of analysis can be enhanced by utilizing focused ion beam (FIB). The FIB instrument allows revealing the structure in the third dimension by controlled and precise milling of the material. In combination with electron beam and suitable detector is possible to describe crystallography (EBSD) or chemical composition (EDS) etc. in three dimensions (3D). Thus, it is feasible to define real size, shape and distribution of microstructure features such as grains, grain boundaries, phases, precipitates and micropores.
Czech name
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Czech description
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Project
<a href="/en/project/KAN300100801" target="_blank" >KAN300100801: Multifunctional bulk metallic materials with nanocrystalline and ultrafine-grained structure</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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