RBS and XPS study of TiOx layers prepared by the PVD technique .

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F04%3A00105673" target="_blank" >RIV/61389005:_____/04:00105673 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

RBS and XPS study of TiOx layers prepared by the PVD technique .

Original language description

The PVD coatings were prepared using Sulzer Innotec's closed magnetic field unbalanced magnetron sputtering facility. The deposition parameters of bias and oxygen flow rate were varied. The prepared samples were analysed by RBS (Rutherford backscatteringspectrometry) to determine the Ti/O ratios and the thicknesses of the coatings, and by ERDA (elastic recoil detection analysis) to investigate the hydrogen content in the surface layer. XPS was used to characterize the near-surface composition and chemical bonding. Measurements of mechanical properties (hardness and thickness) were performed. We concluded from RBS analysis that Ti content is enhanced according to the increased bias and the decreased oxygen flow rate. We observed the increasing hardnessin the case of the higher Ti content layers prepared. We found that a contaminated surface layer exists in which hydrogen, oxygen and carbon are incorporated.

Czech name

Studium vrstech TiOx připravených technikou PVD metodami RBS a XPS

Czech description

Metodou RBS byly určeny poměry Ti/0 a tloušťka povlaků. Metodou ERDA byl vyšetřován obsah vodíku v povrchové vrstvě. Metodou XPS bylo charakterizováno složení v blízkosti povrchu a chemické vazby.

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/GP102%2F01%2FD069" target="_blank" >GP102/01/D069: Analysis of progressive materials by nuclear analytical methods</a><br>

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2004

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Survace and Interface Analysis

ISSN

0142-2421

e-ISSN

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Volume of the periodical

36

Issue of the periodical within the volume

8

Country of publishing house

GB - UNITED KINGDOM

Number of pages

3

Pages from-to

1171-1173

UT code for WoS article

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EID of the result in the Scopus database

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