RBS and XPS Study of TiOx Layers Prepared by PVD Technique

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24210%2F03%3A24210122" target="_blank" >RIV/46747885:24210/03:24210122 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

RBS and XPS Study of TiOx Layers Prepared by PVD Technique

Original language description

The PVD-coatings were prepared using Sulzer Innotec?s closed magnetic field unbalanced magnetron sputtering facility. The deposition parameters the bias and oxygen flow rate were changed. The samples prepared were analysed by RBS (Rutherford Backscatterig Spectrometry) to determine the Ti/O ratios and the thicknesses of the coatings and by ERDA (Elastic Recoil Detection Analysis) to investigate the hydrogen content in the surface layer. XPS (X-ray induced Photoelectron Spectroscopy) was used to characteise the near surface composition and chemical bonding. Measurements of mechanical properties (hardness and thickness) were performed. We concluded from RBS analysis that Ti content is enhanced by the increased bias and the decreased oxygen flow rate. Webserved the increasing hardness according to the higher Ti content in the layers prepared. We found out that the contaminated surface layer exist in which the hydrogen and carbon are incorporated.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BL - Plasma physics and discharge through gases

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Surface and Interface Analysis

ISSN

0142-2421

e-ISSN

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Volume of the periodical

Neuveden

Issue of the periodical within the volume

2003

Country of publishing house

US - UNITED STATES

Number of pages

8

Pages from-to

139-147

UT code for WoS article

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EID of the result in the Scopus database

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