Laser ion implantation of Ge in SiO2 using a post-ion acceleration system
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F17%3A00474564" target="_blank" >RIV/61389005:_____/17:00474564 - isvavai.cz</a>
Alternative codes found
RIV/44555601:13440/17:43892826
Result on the web
<a href="http://dx.doi.org/10.1017/S0263034616000860" target="_blank" >http://dx.doi.org/10.1017/S0263034616000860</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1017/S0263034616000860" target="_blank" >10.1017/S0263034616000860</a>
Alternative languages
Result language
angličtina
Original language name
Laser ion implantation of Ge in SiO2 using a post-ion acceleration system
Original language description
This work reports a comparative study of laser ion implantation mainly performed at the Nuclear Physics Institute in Rez (Czech Republic), National Institute of Nuclear Physics (Italy), and the Plasma Physics Laboratory at the University of Messina (Italy) using different approaches. Thick metallic targets were irradiated in vacuum by a focused laser beam to generate plasma-producing multi-energy and multi-species ions. A post-acceleration system was employed in order to increase the energy of the produced ions and to generate ion beams suitable to be implanted in different substrates. The ion dose was controlled by the laser repetition rate and the time of irradiation. Rutherford backscattering analysis was carried out to evaluate the integral amount of implanted ion species, the concentration-depth profiles, the ion penetration depth, and the uniformity of depth profiles for ions laser implanted into monocrystalline substrates. The laser implantation under normal conditions and in post-acceleration configuration will be discussed on the basis of the characterization of the implanted substrates.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10306 - Optics (including laser optics and quantum optics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Laser and Particle Beams
ISSN
0263-0346
e-ISSN
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Volume of the periodical
35
Issue of the periodical within the volume
1
Country of publishing house
US - UNITED STATES
Number of pages
9
Pages from-to
72-80
UT code for WoS article
000398536200011
EID of the result in the Scopus database
2-s2.0-85007273705