SiC plasma characterization produced by 3 ns pulse laser at 1010 W/cm2 intensity
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F25%3A00587594" target="_blank" >RIV/61389005:_____/25:00587594 - isvavai.cz</a>
Result on the web
<a href="https://www.tandfonline.com/doi/full/10.1080/10420150.2024.2369122" target="_blank" >https://www.tandfonline.com/doi/full/10.1080/10420150.2024.2369122</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1080/10420150.2024.2369122" target="_blank" >10.1080/10420150.2024.2369122</a>
Alternative languages
Result language
angličtina
Original language name
SiC plasma characterization produced by 3 ns pulse laser at 1010 W/cm2 intensity
Original language description
A silicon carbide (SiC) plasma has been produced by a Q-switched laser at 1064 nm, 3 ns pulse and 10(10) W/cm(2) intensity, in high vacuum to investigate the fundamental mechanisms of laser-semiconductor interaction. Although the high hardness and chemical stability restrain the SiC micromachining, it is a valuable semiconductor for devices working under extreme conditions. The plasma has been characterized by using time-of-flight (TOF) measurements of ions detected by an ion collector ring (ICR) and an ion energy analyzer (IEA). Fast CCD camera, quadrupole mass spectroscopy (QMS) and surface profiler have been employed to provide deep insights into the laser-SiC interaction mechanisms. Ion kinetic energies, charge states, plasma expansion velocity, ablation yield per laser pulse, plasma temperature and density have been measured. Applications of the laser-generated plasma are presented and discussed.
Czech name
—
Czech description
—
Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10304 - Nuclear physics
Result continuities
Project
<a href="/en/project/EF16_013%2F0001812" target="_blank" >EF16_013/0001812: Center of Accelerators and Nuclear Analytical Methods - OP</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2025
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Radiation Effects and Defects in Solids
ISSN
1042-0150
e-ISSN
1029-4953
Volume of the periodical
180
Issue of the periodical within the volume
3-4
Country of publishing house
GB - UNITED KINGDOM
Number of pages
10
Pages from-to
380-389
UT code for WoS article
001260291600001
EID of the result in the Scopus database
2-s2.0-85197607467