Implementation of MeV heavy-ion implantation into a microstructures with a defined pattern structure using a nuclear microprobe

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F25%3A00645188" target="_blank" >RIV/61389005:_____/25:00645188 - isvavai.cz</a>

Alternative codes found

RIV/44555601:13440/25:43899424

Result on the web

<a href="https://www.sciencedirect.com/science/article/pii/S0168583X25003106" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0168583X25003106</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.nimb.2025.165920" target="_blank" >10.1016/j.nimb.2025.165920</a>

Result language

angličtina

Original language name

Implementation of MeV heavy-ion implantation into a microstructures with a defined pattern structure using a nuclear microprobe

Original language description

Facilities equipped with electrostatic accelerators for ion beam analysis often perform high-energy ion beam implantation to dope target materials. A typical task of ion implantation is the uniform placement of ions over a large area using a wide-profile raster-scanned beam. Implantation of ions in a specific pattern (ion beam lithography) is also possible. However, this requires the use of masks, which are typically outsourced for production. Laboratories equipped with a nuclear microprobe can accomplish ion beam lithography without the need for masks, using the direct-write method, although the ion mass and energy may be limited by the magnetic rigidity of the microprobe focusing system. The aim of this work is to demonstrate the possibility of heavy ion lithography without the need for outsourced masks, using a nuclear microprobe as an auxiliary technique. The validity of the proposed method was established by implantation of 2.5 MeV gold ions into glass in a pattern with a minimum feature size of 3 mu m. The potential challenges of this method are described in detail. The most critical issue of this method is material incompatibility.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10301 - Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2025

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Nuclear Instruments & Methods in Physics Research Section B

ISSN

0168-583X

e-ISSN

1872-9584

Volume of the periodical

569

Issue of the periodical within the volume

December

Country of publishing house

NL - THE KINGDOM OF THE NETHERLANDS

Number of pages

6

Pages from-to

165920

UT code for WoS article

001661145400001

EID of the result in the Scopus database

2-s2.0-105020012470