EUV nanosecond laser ablation of silicon carbide, tungsten and molybdenum

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F15%3A00452428" target="_blank" >RIV/61389021:_____/15:00452428 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
EUV nanosecond laser ablation of silicon carbide, tungsten and molybdenum
Original language description
In this paper we present results of study interaction of nanosecond EUV laser pulses at wavelength of 46.9 nm with silicon carbide, tungsten and molybdenum. As a source of laser radiation was used discharge plasma driver CAPEX (CAPillary EXperiment) based on high current capillary discharge in argon. The laser beam is focused with a spherical Si/Sc multilayer coated mirror on samples. Experimental study has been performed with 1, 5, 10, 20 and 50 laser pulses ablation of silicon carbide, tungsten and molybdenum at various fluence values. Sample surface modification in the nanosecond time scale have been inspected optically.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Conference proceedings of 9th International Conference on Reactive Plasmas, 68th Gaseous Electronics Conference and 33rd Symposium on Plasma Processing
ISBN
978-4-86348-529-7
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
"GT1.00124"-"GT1.00124"
Publisher name
Japan Society of Applied Physics
Place of publication
Meieki, Nakamura-ku, Nagoya
Event location
Honolulu, Hawaii
Event date
Oct 12, 2015
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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