Plasma abatement of perfluorinated compounds

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F19%3A00506390" target="_blank" >RIV/61389021:_____/19:00506390 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Plasma abatement of perfluorinated compounds
Original language description
Perfluorinated compounds (PFCs) are widely utilized industrial gases, including electronic semiconductor etchants, refrigerants and inert media for power switch gears (sulphur hexafluoride, SF6). These gases are potent source of global warming effect. Because of extremely high stability of PCFs only very high temperature as provided by plasma is effective for their destruction. Water and gas stabilized DC-plasma torch for generating thermal steam plasma has been already used for efficient abatement of CF4, and this work is going on to abate SF6. The experiments were carried out at 20 kW and 40 kW of torch power. The highest destruction efficiency was attained in the mixture at 40 kW of torch power for which the complete removal was attained even for concentration >15% in argon. An effect of additional gas as a reaction agent was also observed for both CF4 and SF6. It was found the certain addition of hydrogen enhances the destruction efficiency.
Czech name
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Czech description
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Project
<a href="/en/project/GC17-10246J" target="_blank" >GC17-10246J: Decomposition of perfluorinated compounds and fluorinated ozone depleting substances in thermal plasma jets</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
8th Central European Symposium on Plasma Chemistry
ISBN
978-961-94716-0-9
ISSN
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e-ISSN
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Number of pages
1
Pages from-to
78-78
Publisher name
Plasmadis
Place of publication
Ljubljana
Event location
Gozd Martuljek
Event date
May 26, 2019
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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