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Abatement of Tetrafluormethane Using Thermal Steam Plasma

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F20%3A00522226" target="_blank" >RIV/61389021:_____/20:00522226 - isvavai.cz</a>

  • Result on the web

    <a href="https://link.springer.com/article/10.1007%2Fs11090-019-10047-0" target="_blank" >https://link.springer.com/article/10.1007%2Fs11090-019-10047-0</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1007/s11090-019-10047-0" target="_blank" >10.1007/s11090-019-10047-0</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Abatement of Tetrafluormethane Using Thermal Steam Plasma

  • Original language description

    Perfluorinated compounds (PFCs) increasingly utilized in electronic manufacturing represent a potent source of global warming effect. Because of extremely high stability of PFCs only very high temperature is effective for their destruction. Thermal plasma offers higher destruction and removal efficiency as compared to conventional methods allowing to reach sufficiently high temperature as well as suitable conditions, including high enthalpy and reactive environment for destruction even of the most persistent PFCs. The aim pursued by this work is to apply water and gas stabilized DC-plasma torch for generating steam plasma for efficient abatement of the most persistent PFC, i.e., CF4, and to observe a dependence of destruction and removal efficiency on operational conditions, including concentration of CF4, input arc power of the plasma torch and an influence of an additional gas. The experiments were carried out at 20 kW and 40 kW of torch power in the concentration range 1-20% of CF4 in mixture with both nitrogen and argon and total feed rate 50 L/min in plasma chemical reactor. The mixture with argon exhibit considerably higher destruction efficiency than that with nitrogen. The highest destruction efficiency was attained in the mixture CF4/argon at 40 kW of torch power. Among other gases (CO2, O-2, H-2) added to CF4 the only hydrogen exhibited a positive effect to destruction performance. It was found an optimal feed rate of additional hydrogen corresponding to the maximum of destruction efficiency.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    20402 - Chemical process engineering

Result continuities

  • Project

    <a href="/en/project/GC17-10246J" target="_blank" >GC17-10246J: Decomposition of perfluorinated compounds and fluorinated ozone depleting substances in thermal plasma jets</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2020

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Plasma Chemistry and Plasma Processing

  • ISSN

    0272-4324

  • e-ISSN

    1572-8986

  • Volume of the periodical

    40

  • Issue of the periodical within the volume

    1

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    15

  • Pages from-to

    309-323

  • UT code for WoS article

    000495301600001

  • EID of the result in the Scopus database

    2-s2.0-85074811383