Abatement of Tetrafluormethane Using Thermal Steam Plasma

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F19%3A00522226" target="_blank" >RIV/61389021:_____/19:00522226 - isvavai.cz</a>

Result on the web

<a href="https://link.springer.com/article/10.1007%2Fs11090-019-10047-0" target="_blank" >https://link.springer.com/article/10.1007%2Fs11090-019-10047-0</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1007/s11090-019-10047-0" target="_blank" >10.1007/s11090-019-10047-0</a>

Result language

angličtina

Original language name

Abatement of Tetrafluormethane Using Thermal Steam Plasma

Original language description

Perfluorinated compounds (PFCs) increasingly utilized in electronic manufacturing represent a potent source of global warming effect. Because of extremely high stability of PFCs only very high temperature is effective for their destruction. Thermal plasma offers higher destruction and removal efficiency as compared to conventional methods allowing to reach sufficiently high temperature as well as suitable conditions, including high enthalpy and reactive environment for destruction even of the most persistent PFCs. The aim pursued by this work is to apply water and gas stabilized DC-plasma torch for generating steam plasma for efficient abatement of the most persistent PFC, i.e., CF4, and to observe a dependence of destruction and removal efficiency on operational conditions, including concentration of CF4, input arc power of the plasma torch and an influence of an additional gas. The experiments were carried out at 20 kW and 40 kW of torch power in the concentration range 1-20% of CF4 in mixture with both nitrogen and argon and total feed rate 50 L/min in plasma chemical reactor. The mixture with argon exhibit considerably higher destruction efficiency than that with nitrogen. The highest destruction efficiency was attained in the mixture CF4/argon at 40 kW of torch power. Among other gases (CO2, O-2, H-2) added to CF4 the only hydrogen exhibited a positive effect to destruction performance. It was found an optimal feed rate of additional hydrogen corresponding to the maximum of destruction efficiency.

Czech name

—

Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

20402 - Chemical process engineering

Project

<a href="/en/project/GC17-10246J" target="_blank" >GC17-10246J: Decomposition of perfluorinated compounds and fluorinated ozone depleting substances in thermal plasma jets</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2019

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Plasma Chemistry and Plasma Processing

ISSN

0272-4324

e-ISSN

—

Volume of the periodical

40

Issue of the periodical within the volume

1

Country of publishing house

US - UNITED STATES

Number of pages

15

Pages from-to

309-323

UT code for WoS article

000495301600001

EID of the result in the Scopus database

2-s2.0-85074811383