Ion beam figuring with using Einzel lens
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F19%3A00536126" target="_blank" >RIV/61389021:_____/19:00536126 - isvavai.cz</a>
Result on the web
<a href="https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11385/2542822/Ion-beam-figuring-with-using-Einzel-lens/10.1117/12.2542822.short" target="_blank" >https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11385/2542822/Ion-beam-figuring-with-using-Einzel-lens/10.1117/12.2542822.short</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2542822" target="_blank" >10.1117/12.2542822</a>
Alternative languages
Result language
angličtina
Original language name
Ion beam figuring with using Einzel lens
Original language description
Ion Beam Figuring (IBF) has been used for nearly 20 years by several laboratories and companies as a highly deterministic method of final processing of ultra-precision optical elements. Nowadays, requirements for high precision optics demand to have full control over the ion beam, which includes both the ion beam profile and intensity. Electrostatic focusing using an Einzel lens setup provides a simple option to control the ion beam shape by changing voltage. This experimental study investigates the early stage development of an Einzel lens used to control an RF40 ion source. First results demonstrate the possibility to use an Einzel lens to control the ion beam profile and indicate possible future challenges this technology has to overcome when used in IBF machines.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
SPIE: Optics and Measurement 2019 International Conference
ISBN
978-1-5106-3548-7
ISSN
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e-ISSN
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Number of pages
7
Pages from-to
"Roč. 11385 (2019)"
Publisher name
SPIE
Place of publication
Bellingham
Event location
Liberec
Event date
Oct 8, 2019
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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