Influence of component imperfection on null ellipsometry with phase modulation
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27350%2F05%3A00013348" target="_blank" >RIV/61989100:27350/05:00013348 - isvavai.cz</a>
Alternative codes found
RIV/61989100:27350/05:00013349
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Influence of component imperfection on null ellipsometry with phase modulation
Original language description
A new null ellipsometer has been recently proposed that uses photoelastic modulator (PEM). The phase modulation adds a good signal-to-noise ratio, high sensitivity, and linearity near null positions to the traditional high-precision nulling system. The ellipsometric angles Delta and psi are obtained by azimuth measurement of the analyzer and the polarizer--PEM system, for which the first and second harmonics of modulator frequency cross the zeros. In this paper we discuss influence of component imperfection on precision of null measurement. Particular interest is devoted to azimuth angle error of compensator and modulator. Effect of residual birefringence of PEM is discussed. We show that the null system is insensitive to ellipsometer misadjustment andcomponent imperfections and modulator calibration is not needed.
Czech name
Vliv nepřesnosti komponent na nulovací elipsometrii s fázovou modulací
Czech description
Vliv nepřesnosti komponent na nulovací elipsometrii s fázovou modulací
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA202%2F03%2F0776" target="_blank" >GA202/03/0776: Magneto-optical effects in magnetic nanostructures</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2005
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Proceedings of SPIE
ISSN
0277-786X
e-ISSN
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Volume of the periodical
5856
Issue of the periodical within the volume
1
Country of publishing house
US - UNITED STATES
Number of pages
9
Pages from-to
143-151
UT code for WoS article
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EID of the result in the Scopus database
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