Null ellipsometer with phase modulation

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27350%2F04%3A00011069" target="_blank" >RIV/61989100:27350/04:00011069 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Null ellipsometer with phase modulation

Original language description

A new null ellipsometer is described that uses photoelasticmodulator (PEM). The phase modulation adds a good signal-to-noiseratio, high sensitivity, and linearity near null positions to the traditionalhigh-precision nulling system. The ellipsometric angles Delta and Psi areobtained by azimuth measurement of the analyzer and the polarizer-PEMsystem, for which the first and second harmonics of modulator frequencycross the zeros. We show that the null system is insensitive to ellipsometermisadjustment andcomponent imperfections and modulator calibrationis not needed. In addition, a fast ellipsometer mode for fine changesmeasurement of ellipsometric angles is proposed.

Czech name

Nulovací elipsometr s fázovou modulací

Czech description

Nulovací elipsometr s fázovou modulací

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2004

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Optics Express

ISSN

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e-ISSN

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Volume of the periodical

24

Issue of the periodical within the volume

12

Country of publishing house

US - UNITED STATES

Number of pages

6

Pages from-to

6040-6045

UT code for WoS article

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EID of the result in the Scopus database

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