The modification of Gaertner L119 ellipsometer and its use for thin-film structures study
Result description
This article deals with modification and renovation of the ellipsometer Gaertner L119 and its using for thin-film structures study. The measurement process is fully automatized. The device works at constant wavelength in PCSA null regime and the data areobtained for various angles of incidence. The system was tested on a set of SiO2 thin-films prepared on Si single crystal wafers by thermal oxidation at 1200°C. The thicknesses obtained from experiment were compared with the results obtained by using ofYamaguchi type spectral ellipsometric system as well as with the data determined from white-light interferometry and spectral reflectometry.
Keywords
The result's identifiers
Result code in IS VaVaI
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
čeština
Original language name
Úprava elipsometru Gaertner L119 a jeho použití pro studium tenkých vrstev
Original language description
Úprava elipsometru Gaertner L119 a jeho použití pro studium tenkých vrstev
Czech name
Úprava elipsometru Gaertner L119 a jeho použití pro studium tenkých vrstev
Czech description
Úprava elipsometru Gaertner L119 a jeho použití pro studium tenkých vrstev
Classification
Type
Jx - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
GA202/06/0531: Reflection and waveguiding effects in magnetic nanostructures
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Fine Mechanics and Optics - Jemná mechanika a optika
ISSN
0447-6441
e-ISSN
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Volume of the periodical
52
Issue of the periodical within the volume
2
Country of publishing house
CZ - CZECH REPUBLIC
Number of pages
3
Pages from-to
40-42
UT code for WoS article
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EID of the result in the Scopus database
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Result type
Jx - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP
BH - Optics, masers and lasers
Year of implementation
2007