Measurement of thin films using slightly dispersive spectral interferometry

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27350%2F07%3A00016599" target="_blank" >RIV/61989100:27350/07:00016599 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Measurement of thin films using slightly dispersive spectral interferometry
Original language description
We present a white-light spectral interferometric technique which is used for measuring the absolute spectral optical path difference (OPD) between the beams in a slightly dispersive Michelson interferometer with a thin- film structure as a mirror. Two spectral interferograms are recorded to obtain the spectral interference signal from which the spectral phase is retrieved that includes the effect of both a cube beam splitter and the phase change on reflection from the thin-film structure. Knowing the effective thickness and dispersion of the beam splitter made of BK7 optical glass, a simple procedure is used to determine both the absolute spectral phase difference and OPD. The spectral OPD is measured for a SiO2 thin film on a silicon substrate and isfitted to the theoretical spectral OPD to obtain the thin-film thickness. The theoretical spectral OPD is determined provided that the optical constants of the thin-film structure are known. We measured also the nonlinear-like spectral p
Czech name
Měření tenkých vrstev užitím slabě disperzní spektrální interferometrie
Czech description
Měření tenkých vrstev užitím slabě disperzní spektrální interferometrie

Project
<a href="/en/project/GA202%2F06%2F0531" target="_blank" >GA202/06/0531: Reflection and waveguiding effects in magnetic nanostructures</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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