Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27350%2F06%3A00016806" target="_blank" >RIV/61989100:27350/06:00016806 - isvavai.cz</a>

Result on the web

—

DOI - Digital Object Identifier

—

Result language

angličtina

Original language name

Dispersive white-light spectral interferometry with absolute phase retrieval to measure thin film

Original language description

We present a white-light spectral interferometric technique for measuring the absolute spectral optical path difference (OPD) between the beams in a slightly dispersive Michelson interferometer with a thin-film structure as a mirror. We record two spectral interferograms to obtain the spectral interference signal and retrieve from it the spectral phase, which includes the effect of a cube beam splitter and the phase change on reflection from the thin-film structure. Knowing the effective thickness and dispersion of the beam splitter made of BK7 optical glass, we use a simple procedure to determine both the absolute spectral phase difference and OPD. The spectral OPD is measured for a uniform SiO2 thin film on a silicon wafer and is fitted to the theoretical spectral OPD to obtain the thin-film thickness. The theoretical spectral OPD is determined provided that the optical constants of the thin-film structure are known. We measure also the nonlinear-like spectral phase and fit it to the

Czech name

Disperzní interferometrie v bílem světle s obnovením absolutní fázepro měření tených vrstev

Czech description

Disperzní interferometrie v bílem světle s obnovením absolutní fázepro měření tených vrstev

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

—

Project

<a href="/en/project/GA202%2F06%2F0531" target="_blank" >GA202/06/0531: Reflection and waveguiding effects in magnetic nanostructures</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2006

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

OPTICS EXPRESS

ISSN

1094-4087

e-ISSN

—

Volume of the periodical

15

Issue of the periodical within the volume

17

Country of publishing house

US - UNITED STATES

Number of pages

8

Pages from-to

7678-7685

UT code for WoS article

—

EID of the result in the Scopus database

—