Precise phase-modulation generalized ellipsometry of anisotropic samples
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27350%2F08%3A00019795" target="_blank" >RIV/61989100:27350/08:00019795 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Precise phase-modulation generalized ellipsometry of anisotropic samples
Original language description
A procedure for the measurement of the generalized ellipsometric angles using a phase-modulation spectroscopic ellipsometer is described. Generalized phase-modulation ellipsometry combined with zone averaging enables precise characterization of samples with generalized anisotropy including anisotropic thin films with general axis orientation, liquid crystals, gratings, and anisotropic nanostructures. We employed a UVISEL Jobin Yvon spectroscopic ellipsometer with a photoelastic modulator (PEM). The Jones matrix formalism is applied to nondepolarizing samples and ellipsometer components description. The zone averaging proposed enables elimination of azimuth-angle error and component imperfection.
Czech name
Přesná fázově modulační zobecněná elipsometrie anizotropních vzorků
Czech description
Přesná fázově modulační zobecněná elipsometrie anizotropních vzorků
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2008
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Phys.Status Solidi A
ISSN
0031-8965
e-ISSN
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Volume of the periodical
205
Issue of the periodical within the volume
4
Country of publishing house
DE - GERMANY
Number of pages
4
Pages from-to
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UT code for WoS article
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EID of the result in the Scopus database
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