Dispersive white-light spectral interferometry including the effect of thin-film for distance measurement
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27350%2F07%3A00016553" target="_blank" >RIV/61989100:27350/07:00016553 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Dispersive white-light spectral interferometry including the effect of thin-film for distance measurement
Original language description
A spectral-domain white-light interferometric technique is used for measuring distances in a Michelson interferometer with a mirror represented by a thin-film structure (TFS) on a substrate. A fibre-optic spectrometer is employed for recording spectral interferograms that include wide wavelength range effects of dispersion in a cube beam splitter and multiple reflection within the TFS. Knowing the effective thickness of the beam splitter, its dispersion and parameters of the TFS and substrate, the positions of the second interferometer mirror are determined precisely by a least-squares fitting of the theoretical spectral interferograms to the recorded ones. We apply the technique to the beam splitter made of BK7 optical glass and to a uniform SiO2 thinfilm on a silicon wafer. We compare the results of the processing that include and do not include the effect of the TFS.
Czech name
Disperzní interferometrie v bílem světle zahrnující jev tloušťky vrstvy pro měření vzdálenosti
Czech description
Disperzní interferometrie v bílem světle zahrnující jev tloušťky vrstvy pro měření vzdálenosti
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA202%2F06%2F0531" target="_blank" >GA202/06/0531: Reflection and waveguiding effects in magnetic nanostructures</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Optik - International Journal for Light and Electron Optics
ISSN
0030-4026
e-ISSN
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Volume of the periodical
118
Issue of the periodical within the volume
7
Country of publishing house
DE - GERMANY
Number of pages
6
Pages from-to
319-324
UT code for WoS article
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EID of the result in the Scopus database
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