Diffractive order Mueller matrix ellipsometry for the design and manufacture of polarization beam splitting metasurfaces

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989100%3A27360%2F24%3A10253526" target="_blank" >RIV/61989100:27360/24:10253526 - isvavai.cz</a>
Alternative codes found
RIV/61989100:27640/24:10253526 RIV/61989100:27740/24:10253526
Result on the web
<a href="https://opg.optica.org/oe/fulltext.cfm?uri=oe-32-1-703&id=544777" target="_blank" >https://opg.optica.org/oe/fulltext.cfm?uri=oe-32-1-703&id=544777</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1364/OE.501709" target="_blank" >10.1364/OE.501709</a>

Result language
angličtina
Original language name
Diffractive order Mueller matrix ellipsometry for the design and manufacture of polarization beam splitting metasurfaces
Original language description
Optical metasurface technology promises an important potential for replacing bulkytraditional optical components, in addition to enabling new compact and lightweight metasurfacebased devices. Since even subtle imperfections in metasurface design or manufacture stronglyaffect their performance, there is an urgent need to develop proper and accurate protocols for theircharacterization, allowing for efficient control of the fabrication. We present non-destructivespectroscopic Mueller matrix ellipsometry in an uncommon off-specular configuration as apowerful tool for the characterization of orthogonal polarization beam-splitters based on a-Si:Hnanopillars. Through Mueller matrix analysis, the spectroscopic polarimetric performance ofthe +-1 diffraction orders is experimentally demonstrated. This reveals a wavelength shift inthe maximum efficiency caused by fabrication-induced conical pillars while still maintaininga polarimetric response close to ideal non-depolarizing Mueller matrices. We highlight theadvantage of the spectroscopic Mueller matrix approach, which not only allows for monitoringand control of the fabrication process itself, but also verifies the initial design and producesfeedback into the computational design.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10300 - Physical sciences

Project
<a href="/en/project/EF16_013%2F0001791" target="_blank" >EF16_013/0001791: IT4Innovations national supercomputing center - path to exascale</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2024
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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