Measurement of thin films by computer processed video-signal

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F00%3A00001001" target="_blank" >RIV/61989592:15310/00:00001001 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Measurement of thin films by computer processed video-signal
Original language description
The interferometrical measuring method of the optical thickness of thin films is presented in this report. The main part of the theory of reflectivity of thin films is presented with the references on the literature. The measurement of optical thicknessof the layers is realized by Michalson's interferometer. Interferogram of measured sample where one half of the flat is with the layer and the other one without the layer is recorded from the screen by CCD camera. The video-signal of two rows of the intensity distribution from the part with layer and without the layer is due to computer processing filtered by FFT and the phase change of the two periodic "continuous" functions is evaluated by the first and second derivation. This phase change enables todetermine the path difference of the light and finally the thickness of the layer.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Publication year
2000
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical
Acta Universitatis Palackianae Olomucensis, Facultas Rerum Naturalium, Physica
ISSN
0231-9772
e-ISSN
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Volume of the periodical
39
Issue of the periodical within the volume
NA
Country of publishing house
XX - stateless person
Number of pages
21
Pages from-to
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UT code for WoS article
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EID of the result in the Scopus database
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