Computerized evaluation optical measuring thin films by the help of Michelson interferometer

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F02%3A00001407" target="_blank" >RIV/61989592:15310/02:00001407 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Computerized evaluation optical measuring thin films by the help of Michelson interferometer

Original language description

The interferometric measurement method of a thin film optical thickness is presented in this report. This measurement is realized by Michelson's interferometer. Interferogram of a measured sample with one half of the surface covered by a layer and the other without a layer is digitally recorded from the screen by CCD camera. The video-signals from two rows of the intensity distribution from the part with and without a layer are numerically filtered via fast Fourier transformation (FFT) and the phase change of the two periodical "continuous" functions is evaluated by the first and second derivatives. This phase change allows to determine the path difference and finally the optical thickness of the layer.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2002

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Materiálové inžinierstvo

ISSN

1335-0803

e-ISSN

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Volume of the periodical

2002

Issue of the periodical within the volume

9

Country of publishing house

SK - SLOVAKIA

Number of pages

8

Pages from-to

27-34

UT code for WoS article

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EID of the result in the Scopus database

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