Measurement uncertainty of white-light interferometry on optically rough surfaces
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61989592%3A15310%2F11%3A33117926" target="_blank" >RIV/61989592:15310/11:33117926 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Measurement uncertainty of white-light interferometry on optically rough surfaces
Original language description
White-light interferometry on rough surfaces is an optical method for the measurement of the geometrical form of objects. The longitudinal coordinate of the measured surface is obtained from the measured interferogram by means of an evaluation method. However, the longitudinal coordinate cannot be determined completely accurately because the interferogram is affected by noise. We calculate the lower limit of the longitudinal measurement uncertainty caused by noise by use of the Cramer-Rao inequality. Additionally, we calculate the lower limit of the longitudinal measurement uncertainty caused by shot noise only.
Czech name
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Czech description
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Classification
Type
C - Chapter in a specialist book
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
<a href="/en/project/ED2.1.00%2F03.0058" target="_blank" >ED2.1.00/03.0058: Regional Centre of Advanced Technologies and Materials</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Book/collection name
Numerical Simulations of Physical and Engineering Processes
ISBN
978-953-307-620-1
Number of pages of the result
12
Pages from-to
491-502
Number of pages of the book
594
Publisher name
InTech
Place of publication
Rijeka, Croatia
UT code for WoS chapter
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